Use 5000W high pressure mercury lamp, with the company’s power supply, power supply three-phase 220V, inside the box flyeye lens array and the lens of the optical interface are quartz material, can ensure long-term use for several years not to UV light intensity output decay too. Idemitsu caliber can be made 8 “, 10”, 12 “round, or 8”, 10 “, 16”, 20 “, 24” square or rectangular beam, 12 “large area of more than square exposure source parallel light of optical components using parallel mirrors, light intensity according to the beam size and shape varies, with 12 “I-line output intensity NUV beam side of about 50 ~ 60mW / cm2, the uniformity of plus or minus 5%, the light source parallel half-size by light caliber different from about 1.5 to 3 degrees. Unlike low-power boxes inside made with circulating air cooling, 5KW boxes inside the lamp due to heat, the use of forced cooling fan do in order to effectively reduce the internal temperature, 5KW UV exposure source can be used in parallel with a large the exposure area of the substrate.