Use 2000W high pressure mercury lamp, with the company’s power supply, power supply three-phase 220V, inside the box flyeye lens array and the lens of the optical interface are quartz material, can ensure long-term use for several years not to UV light intensity output excessive attenuation. light aperture can be made into 4 “, 5”, 6 “, 8”, 10 “, 12” round, or 4 “, 5”, 6 “, 8” square or rectangular beam, beam size and shape depending on the intensity of the light source It varies to 2000W 6 “I-line output beam intensity NUV party of about 80 ~ 90mW / cm2, the uniformity of plus or minus 5%, half-width parallel light by different light diameter of about 1.5 to 3 degrees. optional light strong flyback type power supply to the light intensity inside the box detector signals do feedback control enables stable light intensity output for a long time. in the output beam homogenizing flyeye lens array produced, doing a fine pattern transfer can effectively reduce the exposure of the diffracted light, in order to achieve good graphics resolution, 2000W UV exposure source can be used in parallel with a large-area substrate exposure or exposure of the yellow fast process mass production line.