Parallel light shift to parallel reflective aluminum mirror, the exposure area can be to 60cmx60cm, light intensity 5kW bulbs, 60cm square of NUV light beam of the I-line output intensity of about 15mW / cm2, uniformity of plus or minus 5% to 8%, the light source parallel by half-light of different caliber in about 1.5 to 2.5 degrees. suitable for large area of the substrate exposure process.