Exposure Sources Problems - FAQ

Q. Can I resist have I-line H-line two kinds, and do you have a suitable source of exposure it?

Our standard exposure light source, a wavelength range of NUV (Near UV) containing I-line, H-line, G-line three beam for your needs.

Q. I want to exposed substrate is 6 inches square, I-line exposure energy of about 150mJ / cm2, ask for the source of exposure is the kind?

If you are used in the production line, it is recommended that you use 1000W 6-inch square exposure machine, I-line light intensity of about 40mW / cm2, exposure time of about 4 seconds.

Q. Your source contains three beam exposure NUV, my I-line photoresist is photoresist, we need to use a filter to filter out the other two beams do?

General exposure process without the use of filters, I-line photoresist using an exposure NUV lighting effects normal, if you want to test the performance of the resist material, you can use filters to filter out the other two beams in order to reduce the test factor.

Q. I-line filter using the other two wavelengths filtered NUV, why the intensity I-line will be reduced

I-line filter will block off most of the H-line and G-line two wavelengths, leaving about 70% of I-line wavelength through, but inevitably will block off a small portion of I-line wavelength, there is no 100% of the filter through.

Q. I-line filter will block off most of the H-line and G-line two wavelengths, leaving about 70% of I-line wavelength through, but inevitably will block off a small portion of I-line wavelength, there is no 100% of the filter through.

Mercury lamp time after a long time, in addition to strength decreases, there will be hot surfaces and lights the lamp will not light or other risks, recommendations will be ready to replace the number of hours use.

Q. I use a few hours after exposure light source lights, lighting and normal again, what is the problem?

Check the cooling fan, the air duct may be blocked causing overheating Lightbox internal temperature protection switch is activated, causing the power supply tripped.

Q. After my exposure light source lighting intensity has been low, waiting near an hour are not improved, what is the problem?

Probably because the bulb temperature has been too cold, the mercury inside can not evaporate, check the cooling fan or ventilation pipe, reduce wind speed cooling boxes, so the bulb can heat up.

Q. What is your impression of the high pressure mercury lamp light boxes use Which?

We generally use American ARC mercury lamps For use Ushio, Osram mercury lamp and other brands, we can also fit design.

Q. Our mercury exposure within the box exploded in use, how to deal with the program?

Mercury lamp contains mercury in fever state explosion, mercury will spread like atomized, if the connection boxes have ventilation pipes, ventilation can be about 30 minutes and then clean up the boxes inside boxes if the cooling air directly discharged in the room, personnel should be evacuated and other indoor air discharge line after cleanup boxes inside, clean up the lamp debris should pay attention to safety was not to cut, remove the cloth can be used after the UV lens and wipe slightly elliptical mirror, and to rule out factors that may cause explosion of the lamp, and then put a new lamp relighting operations.

Q. When I change a light bulb finger accidentally hit the light bulb, may I ask how to deal with?

Wear gloves when changing light bulbs and avoid contact with the bulb central part of the sphere, if the finger accidentally hit the lamp, remove the thin cloth dipped in solvent oil lamp on, in order to avoid the risk of explosion.

Q. UV mirror and ask how long elliptical mirror replacement?

Normal use, UV mirror with oval mirror can be used for several years, if the occurrence of the light intensity was significantly reduced, you can see the oval mirror? Are there hot surfaces coated black or acid corrosion leak case, will then decide whether to replace.

Q. Will the number of used mercury lamp is the number?

By bulb factory specifications, 350W lamp is 600 hours, 500W lamp is 800 hours, 1000W lamp is more than 1000 hours.

Q. May I ask why you want to install the mercury bulb installed radiator?

Elliptical mercury lamp is located within the territory of the electrode is surrounded by an elliptical mirror, poor heat dissipation, the need to install the heat sink to enhance heat dissipation.